Zhao, L. ; Liang, J. ; Dong, W. ; Ming, A. ; Lan, W. ; Jin, X. ; Zhu, W. ; Wang, W. ; Le, Z. ; Chen, W. ; Wang, L.
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ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China. pp.60320O-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Hou, L. ; Zhu, H. ; Wang, L. ; Bian, J. ; Wang, W.
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Photonic Applications in Devices and Communication Systems. pp.59700F-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Liang, J. ; Le, Z. ; Wang, W. ; Peng, L. ; Lan, W. ; Ming, A. ; Ye, J. ; Quan, B. ; Yao, J. ; Xuan, M. ; Wang, L.
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Photomask and Next-Generation Lithography Mask Technology XI. pp.975-984, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering