1.

Conference Proceedings
Conference Proceedings
1. The Tuning of Nitride to Oxide Selectivity by Controlling CXHyF Flow, Pressure, and RF Power in the MxP+ Dielectric Etcher
Li, Z. ; Lindley, R. ; Shan, H. ; Wang, J. ; Welch, M. ; Aguilar, J.A.P
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.499-504,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Technical Paper
Technical Paper
2. 3-D simulations of NSTAR ion thruster plasma environment
Wang, J. ; Brophy, J. ; Brinza, D.
Pub. info.: AIAA paper.  pp.1-12,  1996.  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit
Ser. no.: 1996