1.

Conference Proceedings
Conference Proceedings
1. ArF step-and-scan exposure system for 0.15-ｦﾌm and 0.13-ｦﾌm technology nodes
Mulkens,J. ; Stoeldraijer,J.M. ; Davies,G. ; Dierichs,M. ; Heskamp,B. ; Moers,M.H. ; George,R.A. ; Roempp,O. ; Glatzel,H. ; Wagner,C. ; Pollers,I. ; Jaenen,P.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.506-521,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
2.

Conference Proceedings
Conference Proceedings
2. Challenges and opportunities for 157-nm mask technology
Mulkens,J. ; Wagner,C. ; Cummings,K.D. ; George,R.A.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.372-385,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
3.

Conference Proceedings
Conference Proceedings
3. MOVIE:a hardware building block for software-only real-time video processing
Barzic,R. ; Bouville,C. ; Charot,F. ; Fol,G.Le ; Lemonnier,P. ; Wagner,C.
Pub. info.: Digital video compression : algorithms and technologies 1996 : 31 January-2 February, 1996, San Jose, California.  pp.210-221,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2668
4.

Technical Paper
Technical Paper
4. Synthesis and Evaluation of a Combined Cycle With No Stream Nor Cooling Water Requirements
Wicks,F. ; Wagner,C.
Pub. info.: Proceedings of the 28th Intersociety Energy Conversion Engineering Conference : IECEC-93, August 8-13, 1993, Atlanta, Georgia.  pp.105-110,  1993.  Society of Automotive Engineering, Inc.
Title of ser.: SAE publication
Ser. no.: P-X