1.

Conference Proceedings
Conference Proceedings
1. Epitaxial Growth of 4H-SiC on 4o Off-Axis (0001) and (000-1) Substrates by Hot-Wall CVD
Wada, K. ; Kimoto, T. ; Nishikawa, K. ; Matsunami, H.
Pub. info.: Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005.  pp.219-222,  2006.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 527-529
2.

Conference Proceedings
Conference Proceedings
2. Strain Tolerance and Microstructure of Thermal Barrier Coatings Produced by Electron Beam Physical Vapor Deposition Process
Wada, K. ; Ishiwata, Y. ; Yamaguchi, N. ; Matsubara, H.
Pub. info.: High-temperature oxidation and corrosion 2005 : proceedings of the International Symposium on High-Temperature Oxidation and Corrosion 2005 , Nara, Japan, 30th November - 2nd December 2005.  pp.267-276,  2006.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 522-523
3.

Conference Proceedings
Conference Proceedings
3. Improved Surface Morphology and Background Doping Concentration in 4H-SiC(0001) Epitaxial Growth by Hot-Wall CVD
Wada, K. ; Kimoto, T. ; Nishikawa, K. ; Matsunami, H.
Pub. info.: Silicon carbide and related materials 2004 : ECSCRM 2004 : proceedings of the 5th European Conference on Silicon Carbide and Related Materials, August 31 - September 4 2004, Bologna, Italy.  pp.85-88,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 483-485
4.

Conference Proceedings
Conference Proceedings
4. FRACTIONAL CONTRIBUTION IN Si SELF-DIFFUSION: DOPANT CONCENTRATION AND TEMPERATURE DEPENDENCE ON Si SELF-DIFFUSION MECHANISM
Nakabayasbi, Y. ; Osman, H.I. ; Toyonaga, K. ; Yokota, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.241-247,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
5.

Conference Proceedings
Conference Proceedings
5. EFFECT OF VACANCY DOUBLE ACCEPTOR LEVEL ON Si SELF DIFFUSION UNDER HEAVY DOPING CONDITION
Osman, H.I. ; Nakabayashi, Y. ; Tomohisa, S. ; Toyonaga, K. ; Matsumoto, S. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.248-253,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
6.

Conference Proceedings
Conference Proceedings
6. On-chip interconnection beyond semiconductor roadmap: silicon microphotonics (Invited Paper)
Wada, K. ; Luan, H.-C. ; Lim, D.R.C. ; Kimerling, L.C.
Pub. info.: Active and passive optical components for WDM communications II : 29 July-1 August 2002, Boston, USA.  pp.437-443,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4870
7.

Conference Proceedings
Conference Proceedings
7. Surface smoothing of polycrystalline Si waveguides with gas-cluster ion beams
Toyoda, N. ; Lee, K. K. ; Luan, H-C. ; Lim, D. R. ; Agarwal, A. M. ; Wada, K. ; Kimerling, L. C. ; Allen, L. P. ; Fenner, D. B. ; Kirkpatrick A. R.
Pub. info.: Thin films for optical waveguide devices and materials for optical limiting : symposium held November 30-December 3, 1999, Boston, Massachusetts, U.S.A..  pp.51-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 597
8.

Conference Proceedings
Conference Proceedings
8. Theoretical Investigation Of Nitrogen-Doping Effect On Native Defect Aggregation Processes In Silicon
Kageshima, H. ; Taguchi, A. ; Wada, K.
Pub. info.: Defect and impurity engineered semiconductors and devices III : symposium held April 1-5, 2002, San Francisco, California, U.S.A..  pp.79-88,  2002.  Warrendale, Pa.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 719
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Conference Proceedings
Conference Proceedings
9. Determination of Diffusivities of Si Self-Diffusion and Si Self-Interstitials using Isotopically Enriched Single- or Multi-30Si Epitaxial Layers
Matsumoto, S. ; Aid, S.R. ; Sakaguchi, T. ; Toyonaga, K. ; Nakabayashi, Y. ; Sakuraba, M. ; Shimamune, Y. ; Hashiba, Y. ; Murota, J. ; Wada, K. ; Abe, T.
Pub. info.: Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A..  pp.425-436,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 864
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Conference Proceedings
Conference Proceedings
10. Fabrication of Self-Organized Titania Nanostructures on Glass by Combinational Anodizing Technology
Chu, S. Z. ; Inoue, S. ; Wada, K. ; Hishita, S.
Pub. info.: Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium.  pp.79-90,  2006.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-19