1.
Conference Proceedings
W. Cheng ; A. Teramoto ; T. Ohmi
Pub. info.:
ULSI process integration 5 . pp.349-355, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
11(6)
2.
Conference Proceedings
W. Cheng ; A. Teramoto ; C. Tye ; P. Gaubert ; M. Hirayama ; S. Sugawa ; T. Ohmi
Pub. info.:
Silicon-on-insulator technology and devices 13 . pp.101-106, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
6(4)
3.
Conference Proceedings
R. Kuroda ; A. Teramoto ; W. Cheng ; S. Sugawa ; T. Ohmi
Pub. info.:
Silicon-on-insulator technology and devices 13 . pp.113-120, 2007. Pennington, N.J.. Electrochemical Society
Title of ser.:
ECS transactions
Ser. no.:
6(4)
4.
Technical Paper
W. Cheng ; S. Hill ; T. Betenbaugh
Pub. info.:
AIAA meeting papers on disc . 2007. Reston, Va.. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA Space Conference and Exposition
Ser. no.:
2007
5.
Technical Paper
S. Hill ; W. Cheng ; T. Betenbaugh
Pub. info.:
AIAA meeting papers on disc . 2007. Reston, Va.. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA Space Conference and Exposition
Ser. no.:
2007
6.
Technical Paper
S. Hill ; W. Cheng ; T. Betenbaugh
Pub. info.:
AIAA meeting papers on disc . 2007. Reston, Va.. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA Space Conference and Exposition
Ser. no.:
2007
7.
Conference Proceedings
W. Cheng ; J. Farnsworth
Pub. info.:
Optical microlithography XX . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6520
8.
Conference Proceedings
T. Shih ; M. Lin ; P. Tseng ; Y. Chiu ; C. Li ; T. Hung ; W. Cheng
Pub. info.:
Photonics packaging, integration, and interconnects VII : 23-25 January 2007, San Jose, California, USA . 2007. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6478
9.
Conference Proceedings
F. Zhou ; W. Cheng ; X. Lu
Pub. info.:
Electronic imaging and multimedia technology V . 1 pp.683315-1-683315-9, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6833
10.
Conference Proceedings
R. Schenker ; W. Cheng ; G. Allen
Pub. info.:
Photomask technology 2007 . 1 pp.67301M-1-67301M-9, 2007. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6730