1.

Conference Proceedings
Conference Proceedings
1. Developing a method to determine linewidth based on counting the atom spacings across a line
Silver,R.M. ; Jensen,C.P. ; Tsai,V.W. ; Fu,J. ; Villarrubia,J.S. ; Teague,E.C.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.441-460,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332
2.

Conference Proceedings
Conference Proceedings
2. Strategy for faster blind reconstruction of tip geometry for scanned probe microscopy
Villarrubia,J.S.
Pub. info.: Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California.  pp.10-18,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3332