1.

Conference Proceedings

Conference Proceedings
Gosain,Dharam Pal ; Noguchi,Takashi ; Machida,Akio ; Usui,S.
Pub. info.: Proceedings of the Tenth International Workshop on the Physics of Semiconductor Devices (December 14-18, 1999).  Part2  pp.1313-1320,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3975
2.

Conference Proceedings

Conference Proceedings
Ishii,H. ; Usui,S. ; Douki,K. ; Kajita,T. ; Chawanya,H. ; Shimokawa,T.
Pub. info.: Advances in resist technology and processing XVII : 28 February - 1 March 2000, Santa Clara, USA.  Part2  pp.1120-1127,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3999