Shimamura, T. ; Morimura, H. ; Unno, H. ; Fujii, K. ; Shigematsu, S. ; Machida, K. ; Kyuragi, H.
Pub. info.:
Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia. pp.23-30, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Lin, D. ; Hung, K. ; Lee, D. ; Chou, R.L. ; Unno, H. ; Yang, S.C.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.241-251, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hung, K. ; Lin, D. ; Chou, R.L. ; Yang, S.C. ; Lee, D. ; Tseng, A. ; Unno, H. ; Chen, J.-H. ; Huang, J. H.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology IX. pp.666-672, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering