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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium. pp.77-83, 1999. Pennington, NJ. Electrochemical Society
Gross, M. E. ; Lingk, C. ; Siegrist, T. ; Coleman, E. ; Brown, W. L. ; Ueno, K. ; Tsuchiya, Y. ; Itoh, N. ; Ritzdorf, T. ; Turner, J. ; Gibbons, K. ; Klawuhn, E. ; Biberger, M. ; Lai, W. Y. C. ; Miner, J. F. ; Wu, G. ; Zhang, F.
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Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.293-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Ueno, K. ; Donnelly, V. M. ; Tsuchiya, Y. ; Aoki, H.
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Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.521-, 1999. Warrendale, Pa.. MRS - Materials Research Society
Rumaner, Lee E. ; Gray, J. L. ; Ohuchi, F. S. ; Ueno, K. ; Koma, A.
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Structure and properties of multilayered thin films : symposium held April 17-19, 1995, San Francisco, California, U.S.A.. pp.101-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Koshida, N. ; Nakajima, T. ; Yoshiyama, M. ; Ueno, K. ; Nakagawa, T. ; Shinoda, H.
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Microcrystalline and nanocrystalline semiconductors--1998 : symposium held November 30-December 3, 1998, Boston, Massachusetts, U.S.A.. pp.105-, 1999. Warrendale, PA. MRS - Materials Research Society
Advances in microcrystalline and nanocrystalline semiconductors, 1996 : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.699-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society