Ueda, H. ; Kitagawa, A. ; Tokuda, Y. ; Usami, A. ; Wada, T. ; Kano, H.
Pub. info.:
Advanced surface processes for optoelectronics : symposium held April 5-8, 1988, Reno, Nevada, U.S.A.. pp.221-226, 1988. Pittsburgh, Pa.. Materials Research Society
Usami, A. ; Tokuda, Y. ; Shiraki, H. ; Ueda, H. ; Wada, T. ; Kan, H. ; Murakami, T.
Pub. info.:
Rapid thermal processing of electronic materials : symposium held April 21-23, 1987, Anaheim California, U.S.A.. pp.393-400, 1987. Pittsburgh, Pa.. Materials Research Society