1.

Conference Proceedings
Conference Proceedings
1. Fabrication of Piezoelectric Diaphragm using Lead Zirconate Titanate (PZT) Films
Hong, E. ; Krishnaswamy, S.V. ; Freidhoff, C.B. ; Trolier-McKinstry, S.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A..  pp.131-136,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 687
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of MEMS Tonpilz Transducers
Zhou, Q.F. ; Wang, L.-P. ; Gerber, G. ; Meyer, R. Jr., ; Tol, D. Van ; Tadigadapa, S. ; Hughes, W.J. ; Trolier-McKinstry, S.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A..  pp.161-166,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 687
3.

Conference Proceedings
Conference Proceedings
3. Fabrication of Micromachined Piezoelectric Diaphragm Pumps Actuated by Interdigitated Transducer Electrodes
Hong, Eunki ; Krishnaswamy, S.V. ; Braggins, T.T. ; Freidhoff, C.B. ; Trolier-McKinstry, S.
Pub. info.: Nano- and microelectromechanical systems (NEMS and MEMS) and molecular machines : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.111-116,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 741
4.

Conference Proceedings
Conference Proceedings
4. Dielectric properties of highly oriented lead zirconium titanate thin films prepared by reactive RF-sputtering
Kalpat, S. ; Du, X. ; Abothu, I. R. ; Akiba, A. ; Goto, H. ; Trolier-McKinstry, S. ; Uchino, K.
Pub. info.: Materials for smart systems III : symposium held November 30-December 2, 1999, Boston, Massachusetts, U.S.A..  pp.3-,  2000.  Pittsburgh, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 604
5.

Conference Proceedings
Conference Proceedings
5. Wet-Etch Patterning of Lead Zirconate Titanate (PZT) Thick Films for Microelectromechanical Systems (MEMS) Applications
Wang, L.-P. ; Wolf, R. ; Zhou, Q. ; Trolier-McKinstry, S. ; Davis, R.J.
Pub. info.: Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 657
6.

Conference Proceedings
Conference Proceedings
6. Dielectric and Piezoelectric Properties of PZT 52/48 Thick Films With (100) and Random Crystallographic Orientation
Zhou, Q.F. ; Hong, E. ; Wolf, R. ; Trolier-McKinstry, S.
Pub. info.: Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 655
7.

Conference Proceedings
Conference Proceedings
7. Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors
Yang, E.-H. ; Shcheglov, K. ; Trolier-McKinstry, S.
Pub. info.: MOEMS Display and Imaging Systems.  pp.271-278,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4985
8.

Conference Proceedings
Conference Proceedings
8. Concept, modeling, and fabrication techniques for large-stroke piezoelectric unimorph deformable mirrors
Yang, E.-H. ; Shcheglov, K. ; Trolier-McKinstry, S.
Pub. info.: MOEMS and Miniaturized Systems III.  pp.326-333,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4983