1.

Conference Proceedings
Conference Proceedings
1. Defect and Composition Analysis of as-deposited and Nitrided (100)Si/SiO2/Hf1-xSiO2 Stacks byElectron Paramagnectic Resonance and Ion Beam Analysis
von Bardeleben, H. J. ; Cantin, J. L. ; Ganem, J. J. ; Trimaille, I. ; Gusev, E. P.
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.249-263,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Furnace oxynitridation in nitric oxide of thin silicon oxide: Atomic transport mechanisms and interfacial microstructure
Trimaille, I. ; Ganem, J-J. ; Gosset, L. G. ; Bailly, O. ; Rigo, S. ; Cantin, J-L. ; Bardeleben, H. J. von
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.269-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592