1.
|
Conference Proceedings
|
Nelson-Thomas,C. ; Kling,M.E. ; Thompson,M.A. ; Wang,R. ; Cave,N. ; Fu,C.-C.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.464-470, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|
2.
|
Conference Proceedings
|
Wang,R. ; Grobman,W.D. ; Reich,A.J. ; Thompson,M.A.
Pub. info.: |
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.406-417, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4562 |
|