1.
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Conference Proceedings
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Belyaev, A. ; Tarasov, I. ; Ostapenko, S. ; Koveshnikov, S. ; Kochelap, V.A. ; Beyaev, A.E.
Pub. info.: |
High Purity Silicon VI : proceedings of the sixth International Symposium. pp.660-669, 2000. Bellingham, Wash.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2000-17 |
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2.
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Conference Proceedings
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Diaz, A.Belyaev; F. ; Moreno, W. ; Ostapenko, S. ; Pacheno, F. ; Tarasov, I. ; Totzke, D.
Pub. info.: |
Chemical Mechanical Planarization : proceedings of the International Symposium. pp.94-101, 2000. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
Electrochemical Society Proceedings Series |
Ser. no.: |
2000-26 |
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