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22 results

Conference Proceedings

1. CRYSTAL ORIGINATED SINGULARITIES ON SILICON WAFERS AFTER SCl CLEANING

Morita, E. ; Ryuta, J. ; Tanaka, T. ; Shimanuki, Y.

Pub. info.:	Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A.. pp.161-166, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	259

Conference Proceedings

2. Elementary Reaction Simulation of Al-CVD Using Dimethyl Aluminum Hydride

Sugiyama, M. ; Nakajima, T. ; Tanaka, T. ; Itoh, H. ; Aoyama, J. ; Egashira, Y. ; Yamashita, K. ; Komiyama, H. ; Shimogaki, Y.

Pub. info.:	Interconnect and contact metallization for ULSI : proceedings of the international symposium. pp.56-67, 1999. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-31

Conference Proceedings

3. INVITED: NATURE AND GENERATION OF GROWN-IN DEFECTS IN CZOCHRALSKI SILICON CRYSTALS

Hourai, M. ; Nishikawa, H. ; Tanaka, T. ; Umeno, S. ; Asayama, E. ; Nomachi, T. ; Kelly, G.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.453-467, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(1)

Conference Proceedings

4. Electrochemical Properties of Inorganic Cation Exchange Membrane Prepared from Antimony Triethoxide

Suzuki, Y. ; Kogure, M. ; Sato, T. ; Kanzaki, Y. ; Tanaka, T.

Pub. info.:	Proceedings of the Symposia on Chlor-Alkali and Chlorate Production and New Mathematical and Computational Methods in Electrochemical Engineering. pp.17-27, 1993. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	1993-14

Conference Proceedings

5. Deposition Behavior of Latex Particles in Filtration Process Through Glass Packed Column

Chinju, H. ; Nagasaki, S. ; Tanaka, S. ; Tanaka, T. ; Ogawa, H.

Pub. info.:	Scientific basis for nuclear waste management XXII : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A.. pp.743-750, 1999. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	556

Conference Proceedings

6. Corrosion Behavior of the Al-Zn sprayed Open Rack Vaporizer in Sea Water

Hashimoto, I. ; Tanaka, T. ; Hisamoto, J. ; Shinkai, K.

Pub. info.:	Corrosion and corrosion control in saltwater environments : proceedings of the international symposium. pp.193-204, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-26

Conference Proceedings

7. Photocatalytic Oxidation of Ethanol over Tantalum Oxide Supported on Silica

Tanaka, T. ; Takenaka, S. ; Funabiki, T. ; Yoshida, S.

Pub. info.:	Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.485-, 1994. Tokyo. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	90

Conference Proceedings

8. Base Sites of Magnesium Oxide Dispersed on Silica as Active Sites for CO Photooxidation

Yoshida, H. ; Tanaka, T. ; Nakatsuka, K. ; Funabiki, T. ; Yoshida, S.

Pub. info.:	Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.473-, 1994. Tokyo. Elsevier
Title of ser.:	Studies in surface science and catalysis
Ser. no.:	90

Conference Proceedings

9. Control of Grown-in Defects in Czochralski Silicon Crystals

Hourai, M. ; Kelly, G.P. ; Tanaka, T. ; Umeno, S. ; Ogushi, S.

Pub. info.:	Proceedings of the Third International Symposium on Defects in Silicon. pp.372-385, 1999. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	99-1

10.

Conference Proceedings

10. Thermodynamic Evaluation of Surface Tension of Molten Salt Mixtures

Tanaka, T. ; Hara, S. ; Ueda, T.

Pub. info.:	Proceedings of the eleventh International Symposium on Molton [i.e. Molten] Salts XI. pp.645-650, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-11

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