1.

Conference Proceedings
Conference Proceedings
1. Adsorption and Desorption of Contaminant Metals on Si Wafer Surface in SC1 Solution
Maeda, G. ; Takahashi, I. ; Kondo, H. ; Ryuta, J. ; Shingyouji, T.
Pub. info.: Ultraclean semiconductor processing technology and surface chemical cleaning and passivation : Symposum held April 17-19, 1995, San Francisco, California, USA.  pp.195-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 386
2.

Conference Proceedings
Conference Proceedings
2. DISTRIBUTION OF MICROCRYSTALS IN AMORPHOUS 5i02 ON Si(O01) SURFACE
Takahashi, I. ; Harada, J.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1147-1155,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10