1.

Conference Proceedings
Conference Proceedings
1. Degradation of Charge Collection Efficiency Obtained for 6H-SiC n+p Diodes Irradiated with Gold Ions
T. Ohshima ; T. Satoh ; M. Oikawa ; S. Onoda ; S. Hishiki ; T. Hirao ; T. Kamiya ; T. Yokoyama ; A. Sakamoto ; R. Tanaka ; I. Nakano ; G. Wagner ; H. Itoh
Pub. info.: Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006.  pp.913-916,  2007.  Stafa-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 556-557
2.

Conference Proceedings
Conference Proceedings
2. Development of Sn-fueled high-power DPP EUV source for enabling HVM
Y. Teramoto ; Z. Narihiro ; D. Yamatani ; T. Yokoyama ; K. Bessho ; Y. Joshima ; T. Shirai ; S. Mouri ; T. Inoue ; H. Mizokoshi ; G. Niimi ; T. Hosokai ; H. Yabuta ; K. C. Paul ; T. Takemura ; T. Yokota ; K. Kabuki ; K. Miyauchi ; K. Hotta ; H. Sato
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517
3.

Conference Proceedings
Conference Proceedings
3. Birefringence variation of quartz substrates during mask process
Y. Morikawa ; Y. Kitahata ; T. Yokoyama ; T. Kikuchi ; A. Kawaguchi ; Y. Ohkubo
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533
4.

Conference Proceedings
Conference Proceedings
4. Characteristics optimization of mask materials for hyper-NA lithography
Y. Morikawa ; T. Suto ; T. Nagai ; Y. Inazuki ; T. Adachi ; Y. Kitahata ; T. Yokoyama ; N. Toyama ; H. Mohri ; N. Hayashi
Pub. info.: EMLC 2007 : 23rd european mask and lithography conference : 22-25 January 2007, Grenoble, France.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6533