Miura, S. ; Ovamada, K. ; Watanabe, S. ; Sugimoto, M. ; Kouzai, H. ; Honma, H.
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Copper interconnects, new contact metallurgies, structures, and low-k interlevel dielectrics : proceedings of the internatioal symposium. pp.22-29, 2002. Pennington, N.J.. Electrochemical Society
Shibata, H. ; Suzuki, H. ; Sugimoto, M. ; Matsui, Y. ; Kondoh, J.
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Advanced environmental, chemical, and biological sensing technologies IV : 1-3 October 2006, Boston, Massachusetts, USA. pp.63770G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Minehara, E.J. ; Hajima, R. ; Sawamura, M. ; Nagai, R. ; Nishimori, N. ; Kikuzawa, N. ; Sugimoto, M. ; Yamauchi, T. ; Hayakawa, T. ; Shizuma, T.
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Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.336-345, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering