1.

Conference Proceedings
Conference Proceedings
1. Characterization of High-k Dielectrics by Combined Spectroscopic Ellipsometry (SE) and X-Ray Reflectometry (XRR)
Sun, L. ; Defranoux, C. ; Stehle, J. L. ; Boher, P. ; Evrard, P. ; Bellandi, E. ; Bender, H.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.95-102,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786
2.

Conference Proceedings
Conference Proceedings
2. Determination of complex index of immersion liquids at 193nm [6154-172]
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.: Optical Microlithography XIX.  pp.61544G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
3.

Conference Proceedings
Conference Proceedings
3. New measuring technique of complex index of immersion liquids [6152-120]
Stehle, J. L. ; Piel, J. P. ; Campillo-Carreto, J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615233-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
4.

Conference Proceedings
Conference Proceedings
4. Spectroscopic polarized scatterometry applied to single-line profiling [6152-116]
Stehle, J. L. ; Piel, J. P ; Campillo, J. ; Zahorski, D. ; Giovannini, H.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61522Z-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152