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Conference Proceedings

1. Tribological Experiments Applied to Tungsten Chemical- Mechanical Polishing

Agarwal, P. ; Bielmann, M. ; Lolt, D. ; Mahajan, U. ; Mischler, S. ; Rosset, E. ; Singh, R. K.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.97-102, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566

Conference Proceedings

2. Effect of Particle Size During Tungsten Chemical-Mechanical Polishing

Bielmann, M. ; Mahajan, V. ; Singh, R. K.

Pub. info.:	Chemical mechanical polishing -- fundamentals and challenges : symposium held April 5-7, 1999, San Francisco, California, U.S.A.. pp.103-108, 2000. Warrendale, PA. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	566