Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.342-347, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Shi, X. ; Socha, R. J. ; Bendik, J. ; Dusa, M. V. ; Conley, W. ; Su, B.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.777-784, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Tong, H.C. ; Qian, C. ; Miloslavsky, L. ; Shi, X. ; Liu, F. ; Huai, Y. ; Lederman, M. ; Dey, S.
Pub. info.:
Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS). pp.141-155, 1998. Pennington, NJ. Electrochemical Society
Kohlman, R. ; Klimov, V. ; Shi, X. ; Grigorova, M. ; Mattes, B. R. ; McBranch, D. ; Wang, H. ; Wudl, F. ; Nogues, J-L. ; Moreshead, W.
Pub. info.:
Electrical, optical, and magnetic properties of organic solid-state materials IV : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.. pp.237-, 1998. Pittsburgh, Pa.. MRS - Materials Research Society
Shi, X. ; Pollock, T. M. ; Mahajan, S. ; Arunachalam, V. S.
Pub. info.:
High-Temperature ordered intermetallic alloys VII : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.493-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society