1.
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Conference Proceedings
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Ben-Yakar, A. ; Harkin, A. ; Ashmore, J. ; Shen, M. ; Mazur, E. ; Byer, R.L. ; Stone, H.A.
Pub. info.: |
Photon Processing in Microelectronics and Photonics II. pp.335-345, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4977 |
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2.
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Conference Proceedings
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Ebihara, T. ; Levenson, M.D. ; Liu, W. ; He, J. ; Yeh, W. ; Ahn, S. ; Oga, T. ; Shen, M. ; M'saad, H.
Pub. info.: |
23rd Annual BACUS Symposium on Photomask Technology. pp.985-994, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5256 |
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3.
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Conference Proceedings
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Kuo, C.-H. ; Shen, M. ; Kuo, C.-C.J.
Pub. info.: |
Multimedia Systems and Applications VI. pp.76-87, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5241 |
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4.
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Conference Proceedings
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Chowdhury, T. ; Bamnolker, H. ; Khen, R. ; Yang, C.-L. ; Lee, H.-C. ; Du, Y. ; Shen, M. ; Choi, J. ; Deshmukh, S.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.240-248, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
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5.
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Conference Proceedings
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Shen, M. ; Minasian, R.A.
Pub. info.: |
Photonic Integrated Systems. pp.170-177, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4998 |
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