1.

Conference Proceedings
Conference Proceedings
1. Defect detection for short-loop process and SRAM-cell optimization by using addressable failure site-test structures(AFS-TS)
Doong, K.Y.-Y. ; Hsieh, S. ; Lin, S.C. ; Wang, J.R. ; Shen, B. ; Hung, L.J. ; Guo, J.C. ; Chen, I.C. ; Young, K.L. ; Hsu, C.C.-H.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.81-87,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
2.

Conference Proceedings
Conference Proceedings
2. Effect of Additional HCl on the Surface Morphology of High Quality GaN on Sapphire by HVPE
Xiu, X.Q. ; Zhang, R. ; Lu, D.Q. ; Gu, L. ; Shen, B. ; Shi, Y. ; Zheng, Y.D.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.135-140,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
3.

Conference Proceedings
Conference Proceedings
3. Effect of the Inter-Subband Scattering in Modulation-Doped AlxGa1-xN/GaN Heterostructures
Zheng, Z.W. ; Shen, B. ; Jiang, C.P. ; Guo, S.L. ; Liu, J. ; Zhou, H.M. ; Zhang, R. ; Shi, Y. ; Zheng, Y.D. ; Zheng, G.Z. ; Chu, J.H. ; Someya, T. ; Arakawa, Y.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.401-406,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
4.

Conference Proceedings
Conference Proceedings
4. Extraction of Polarization-Induced Charge Density in Modulation-Doped AlxGa1-xN/GaN Heterostructures Based on Schottky C-V Simulation
Zhou, Y.G. ; Shen, B. ; Yu, H.Q. ; Liu, J. ; Zhou, H.M. ; Zhang, R. ; Shi, Y. ; Zheng, Y.D. ; Someya, T. ; Arakawa, Y.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.749-754,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
5.

Conference Proceedings
Conference Proceedings
5. Transport Studies on Two-Subband-Populated AlGaN/GaN Heterostructures
Hang, D.R. ; Huang, C.F. ; Chen, Y.F. ; Shen, B.
Pub. info.: GaN and related alloys - 2002 : symposium held December 2-6, Boston, Massachusetts, U.S.A..  pp.783-788,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 743
6.

Conference Proceedings
Conference Proceedings
6. Preparation of ZnAl2O4/α-Al2O3 Complex Substrates and Growth of GaN Films
Bi, Z.X. ; Zhang, R. ; Li, W.P. ; Wang, X.S. ; Gu, S.L. ; Shen, B. ; Shi, Y. ; Liu, Z.G. ; Zheng, Y.D.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.413-418,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
7.

Conference Proceedings
Conference Proceedings
7. Optical and Structural Properties of Mn-Implanted GaN Films
Xu, J. ; Li, J. ; Zhang, R. ; Xiu, X.Q. ; Lu, D.Q. ; Gu, S.L. ; Shen, B. ; Shi, Y. ; Zheng, Y.D.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.207-212,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693
8.

Conference Proceedings
Conference Proceedings
8. Direct to digital holography for semiconductor wafer defect detection and review(Invited Paper)
Thomas, C.E., Jr. ; Bahm, T.M. ; Baylor, L.R. ; Bingham, P.R. ; Burns, S.W. ; Chidley, M.D. ; Dai, X.L. ; Delahanty, R.J. ; Doti, C.J. ; El-Khashab, A. ; Fisher, R.L. ; Gilbert, J.M. ; Goddard, J.S. ; Hanson, G.R. ; Hickson, J.D. ; Hunt, M.A. ; Hylton, K.W. ; John, G.C. ; Jones, M.L. ; MacDonald, K.R. ; Mayo, M.W. ; McMackin, I. ; Patek, D.R. ; Price, J.H. ; Rasmussen, D.A. ; Schaefer, L.J. ; Scheidt, T.R. ; Schulze, M.A. ; Schumaker, P.D. ; Shen, B. ; Smith, R.G. ; Su, A.N. ; Tobin, K.W., Jr. ; Usry, W.R. ; voelkl, E. ; Weber, K.S. ; Jones, P.G. ; Owen, R.W.
Pub. info.: Design, process integration, and characterization for microelectronics : 6-7 March 2002, Santa Clara, USA.  pp.180-194,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4692
9.

Conference Proceedings
Conference Proceedings
9. Fabrication and Investigation of the Metal-Ferroelectric-Semiconductor Structure With Pb(Zr0.53Ti0.47)O3 on AlxGa1-xN/GaN Heterostructures
Shen, B. ; Li, W.P. ; Wang, X.S. ; Yan, F. ; Zhang, R. ; Bi, Z.X. ; Shi, Y. ; Liu, Z.G. ; Zheng, Y.D. ; Someya, T. ; Arakawa, Y.
Pub. info.: GaN and related alloys - 2001 : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A..  pp.743-748,  2002.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 693