1.

Conference Proceedings
Conference Proceedings
1. Investigation of SOG Etchback Uniformity in MxP+ with ESC
Bjorkman, C.H. ; Fong, H. ; van der Reijden, M.J. ; Shan, H. ; Welch, M. ; Fischback, K.A.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.531-535,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. The Tuning of Nitride to Oxide Selectivity by Controlling CXHyF Flow, Pressure, and RF Power in the MxP+ Dielectric Etcher
Li, Z. ; Lindley, R. ; Shan, H. ; Wang, J. ; Welch, M. ; Aguilar, J.A.P
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.499-504,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12