1.

Conference Proceedings
Conference Proceedings
1. Noncontact ultrasonic ULSI process metrology using ultrafast lasers
Stoner,R.J. ; Morath,C.J. ; Tas,G. ; Sengupta,S.S. ; Merchant,S.M. ; Bindell,J.B. ; Maris,H.J.
Pub. info.: Commercial applications of ultrafast lasers : 29-30 January 1998, San Jose, California.  pp.104-112,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3269
2.

Conference Proceedings
Conference Proceedings
2. Integration of a W-plug in an Al-based metallization scheme for O.25-ｦﾌm IC technology
Sengupta,S.S. ; Bothra,S.
Pub. info.: Multilevel Interconnect Technology II.  pp.110-121,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3508