Lee, C. ; Itoh, T. ; Chu, J. ; Ohashi, T. ; Maeda, R. ; Schroth, A. ; Suga, T.
Pub. info.:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.35-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts,U.S.A.. pp.233-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Buchhold, R. ; Buttner, U. ; Nakladal, A. ; Sager, K. ; Hack, E. ; Bronnimann, R. ; Sennhauser, U. ; Schroth, A.
Pub. info.:
Materials for smart systems II : sympsoium held December 2-5, 1996, Boston, Massachusetts, U.S.A.. pp.243-, 1997. Pittsburgh, PA. MRS - Materials Research Society