Ploessl, A. ; Scholz, R. ; Schulze, H.-J. ; Hopfe, S.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.224-231, 1999. Pennington, N.J.. Electrochemical Society
Ploessl, A. ; Scholz, R. ; Stenzel, H. ; Richtel, U. ; Schmidthals, C.
Pub. info.:
Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications. pp.417-424, 1997. Pennington, NJ. Electrochemical Society
Ploessl, A. ; Scholz, R. ; Bagdahn, J. ; Stenzel, H. ; Tu, K.N. ; Goesele, U.M.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1361-1372, 1998. Pennington, NJ. Electrochemical Society