1.

Conference Proceedings
Conference Proceedings
1. THE CHARACTERIZATION OF 0.1 pm LPD (LIGHT POINT DEFECT) PATTERNS IN MASS PRODUCTION OF SILICON WAFER WAFER
Oh, H.-S. ; Maeng, H.-J. ; Bae, K.-M. ; Kim, J.-R. ; Hong, Y.-K. ; Shin, J.-S. ; Kwon, J.-H. ; Rozgonyi, G.A. ; Lee, H.-L.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.707-726,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
2.

Conference Proceedings
Conference Proceedings
2. EFFECT OF HEAVY BORON DOPING ON OXIDE PRECIPITATE GROWTH IN CZOCHRALSKI SILICON
Ono, T. ; Asayama, E. ; Horie, H. ; Hourai, M. ; Sueoka, K. ; Tsuya, H. ; Rozgonyi, G.A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1113-1125,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
3.

Conference Proceedings
Conference Proceedings
3. Oxygen Precipitation Behaviour in 300 mm Polished Czochralski Silicon Wafers
Ono, T. ; Rozgonyi, G.A. ; Au, C. ; Messina, T. ; Goodall, R.K. ; Huff, H.R.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.125-134,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13
4.

Conference Proceedings
Conference Proceedings
4. DIRECT OBSERVATION OF MEDIUM FIELD BREAKDOWN ORIGIN ON MOS CAPACITORS CONTAINING GROWN-IN CZ CRYSTAL DEFECTS
Tamatsuka, M. ; Radzimski, Z. ; Rozgonyi, G.A. ; Oka, S. ; Kato, M. ; Kitagawara, Y.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.1593-1609,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(2)
5.

Conference Proceedings
Conference Proceedings
5. INVITED: SILICON WAFER DEFECT ENGINEERING
Rozgonyi, G.A.
Pub. info.: Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology.  pp.279-300,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-1(1)
6.

Conference Proceedings
Conference Proceedings
6. Gettering of Fe, Cu and Ni in MeV Ion Implanted Epitaxial Silicon
Koveshnikov, S. ; Kononchuk, O. ; Beaman, K. ; Rozgonyi, G.A. ; Gonzalez, F.
Pub. info.: Proceedings of the Fifth International Symposium on High Purity Silicon V.  pp.341-354,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-13