Park, J-G. ; Kirk, H. ; Cho, K-C. ; Lee, H-K. ; Lee, C-S. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.370-378, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.868-883, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.495-504, 1994. Pennington, NJ. Electrochemical Society
Kikuchi, H. ; Agarwai, A. ; Koveshnikov, S. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.298-304, 1994. Pennington, NJ. Electrochemical Society
Kirk, H.R. ; Park, J.G. ; Lee, D.M. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.275-285, 1994. Pennington, NJ. Electrochemical Society
Park, J-G. ; Kirk, H. ; Lee, C-S. ; Lee, H-K. ; Lee, D-M. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.57-71, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.157-166, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.167-175, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II. pp.1-14, 1994. Pennington, NJ. Electrochemical Society