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Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1593-1609, 1998. Pennington, NJ. Electrochemical Society
Tamatsuka, M. ; Oka, S. ; Kirk, H.R. ; Rozgonyi, G.A.
Pub. info.:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.80-91, 1997. Pennington, NJ. Electrochemical Society