Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.495-504, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.157-166, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II. pp.1-14, 1994. Pennington, NJ. Electrochemical Society