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20 results

Conference Proceedings

1. EPITAXIAL GROWTH AND STABILITY OF 649 TiSi2 ON Si(111)

Jeon, Hyeongtag ; Honeycutt, J. W. ; Sukow, C. A. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.

Pub. info.:	Epitaxial heterostructures : symposium held April 16-19, 1990, San Francisco, California, U.S.A.. pp.595-600, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	198

Conference Proceedings

2. Delineation of p-n Junctions on Cross Sectional TEM Device Samples

Knoesen, D. ; Zhang, F ; Rozgonyi, G. A.

Pub. info.:	Specimen preparation for transmission electron microscopy of materials--II : symposium held April 19-20, 1990, San Francisco, California, U.S.A.. pp.299-308, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	199

Conference Proceedings

3. EFFECTS OF CONCURRENT Co OR Ti SILICIDATION ON TRANSIENT DIFFUSION AND END-OF-RANGE DAMAGE IN PHOSPHORUS IMPLANTED SILICON

Honeycutt, J. W. ; Ravi, J. ; Rozgonyi, G. A.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.701-706, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

4. METALLIC IMPURITIES IN n- AND p-TYPE SILICON: DLTS STUDIES

Agarwal, Aditya ; Radzimaski, Z. J. ; Buczkowski, Z. ; Shimura, F. ; Rozgonyi, G. A.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.615-620, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

5. EBIC ANALYSIS OF GETTERING AT Si-Si(Ge) HETEROEPITAXIAL MISFIT DISLOCATIONS AS A FUNCTION OF IMPURITY DECORATION

Kirk, H. R. ; Radzimaski, Z. J. ; Fitzgerald, E. A ; Rozgonyi, G. A.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.609-614, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

6. TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON

Xiao, Z. G. ; Jiang, H. ; Honeycutt, J. ; Osburn, C. M. ; McGuire, G. ; Rozgonyi, G. A.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.167-172, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

Conference Proceedings

7. DEEP LEVEL ENERGY ANALYSIS OF SURFACE AND BULK DEFECTS USING A NONCONTACT LASER/MICROWAVE PHOTOCONDUCTANCE TECHNIQUE

Buczkowski, A. ; Rozgonyi, G. A. ; Shimura, F.

Pub. info.:	Photo-induced space charge effects in semiconductors: electro-optics, photoconductivity, and the photorefractive effect : symposium held April 29-May 1, 1992, San Francisco, California, U.S.A.. pp.235-240, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	261

Conference Proceedings

8. TiSi2 THIN FILMS FORMED ON CRYSTALLINE AND AMORPHOUS SILICON

Xiao, Z. G. ; Jiang, H. ; Honeycutt, J. ; Osborn, C. M. ; McGUire, G. ; Rozgonyi, G. A.

Pub. info.:	Polysilicon thin films and interfaces. pp.65-70, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	182

Conference Proceedings

9. INTERFACE MORPHOLOGY, NUCLEATION AND ISLAND FORMATION OF TiSi2 ON Si(111)

Jeon, Hyeongtag ; Sukow, C. A. ; Honeycutt, J. W. ; Humphreys, T. P. ; Nemanich, R. J. ; Rozgonyi, G. A.

Pub. info.:	Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A.. pp.559-564, 1990. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	181

10.

Conference Proceedings

10. INVESTIGATION OF METAL INDUCED SURFACE DEFECTS IN CZOCHRALSKI Si FOLLOWING RAPID THERMAL PROCESSING BY THERMAL WAVE MODULATED REFLECTANCE METHOD

Hahn, S. ; Smith, W. L. ; Suga, H. ; Park, J. G. ; Lim, C. S. ; Kwak, Y.-S. ; Meinecke, R. ; Kola, R. R. ; Rozgonyi, G. A. ; Kwack, K. D.

Pub. info.:	Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.. pp.81-88, 1991. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	224

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