1.

Conference Proceedings
Conference Proceedings
1. Plasma antireflective coating optimization using enhanced reflectivity modeling
Lucas,K.D. ; Vasquez,J.A. ; Jain,A. ; Filipiak,S.M. ; Vuong,T. ; King,C.F. ; Roman,B.J.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.194-204,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
2.

Conference Proceedings
Conference Proceedings
2. Full-field CD control for sub-0.20-ｦﾌm patterning
Sturtevant,J.L. ; Allgair,J. ; Barrick,M.W. ; Fu,C. ; Green,K.G. ; Hershey,R.R. ; Litt,L.C. ; Maltabes,J.G. ; Nelson,C. ; Roman,B.J. ; Singelyn,J.
Pub. info.: Optical Microlithography X.  pp.137-145,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051