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Conference Proceedings

1. AVOIDING DISLOCATION FORMATION FOR B, P, AND As IMPLANTS IN SILICON

Liefting, J. R. ; Raineri, V. ; Schreutelkamp, R. J. ; Custer, J. ; Saris, F. W.

Pub. info.:	Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A.. pp.173-178, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	235

Conference Proceedings

2. Localized Lifetime Control in silicon Bipolar Power Devices by Voids Induced by He Ion Implantation

Saggio, M. ; Raineri, V. ; Frisina, F. ; Rimini, E.

Pub. info.:	Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A.. pp.45-, 1998. Warrendale, Penn.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	483

Conference Proceedings

3. Kinetics of the C49-C54 Transformation in Patterned and Blanket TiSi2 Films: A Comparison

Via, F. La ; Privitera, S. ; Grimaldi, M. G. ; Raineri, V. ; Galli, M. ; Marabelli, F. ; Iannuzzi, M. ; Miglio, L.

Pub. info.:	Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A.. pp.219-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	514

Conference Proceedings

4. Titanium Silicidation and Secondary Defect Annihilation in Ion Beam Processed SiGe Layers

Larsen, K. Kyllesbech ; Via, F. La ; Lombardo, S. ; Raineri, V. ; Donaton, R. A. ; Campisano, S. U.

Pub. info.:	Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA. pp.149-, 1996. Pittsburgh. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	402