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10 results

Conference Proceedings

1. Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling

Y. Shishkin ; R.L. Myers-Ward ; S.E. Saddow ; A. Galyukov ; A. Vorob'ev ; D. Brovin ; D. Bazarevskiy ; R. Talalaev ; Y.N. Makarov

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.61-64, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

Conference Proceedings

2. In Situ Measurement of Nitrogen during Growth of 4H-SiC by CVD

B.L. Van Mil ; K.K. Lew ; R.L. Myers-Ward ; R.T. Holm ; D.K. Gaskill ; C.R. Eddy Jr

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.125-128, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

Conference Proceedings

3. Microhardness of 6H- and 4H-SiC Substrates

C.R. Eddy Jr. ; P. Wu ; I. Zwieback ; B.L. VanMil ; R.L. Myers-Ward

Pub. info.:	Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain. pp.323-326, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	615-617

Conference Proceedings

4. Turning of Basal Plane Dislocations during Epitaxial Growth on 4° Off-Axis 4H-SiC

R.L. Myers-Ward ; B.L. VanMil ; R.E. Stahlbush ; S.L. Katz ; J.M. McCrate

Pub. info.:	Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain. pp.105-108, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	615-617

Conference Proceedings

5. Basal Plane Dislocation Mitigation in 8° Off-Cut 4H-SiC through In Situ Growth Interrupts during Chemical Vapor Deposition

B.L. Vanmil ; R.E. Stahlbush ; R.L. Myers-Ward ; Y.N. Picard ; S.A. Kitt

Pub. info.:	Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain. pp.61-66, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	615-617

Conference Proceedings

6. Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

R.E. Stahlbush ; B.L. VanMil ; K.X. Liu ; K.K. Lew ; R.L. Myers-Ward

Pub. info.:	Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007. pp.317-320, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	600-603

Conference Proceedings

7. Impact of 4H-SiC Substrate Defectivity on Epilayer Injected Carrier Lifetimes

R.L. Myers-Ward ; K.K. Lew ; B.L. VanMil ; R.E. Stahlbush ; K.X. Liu

Pub. info.:	Silicon carbide and related materials 2007 : selected peer reviewed papers from the International Conference on Silicon Carbide and Related Materials 2007, Otsu Prince Hotel Covention Hall, Lake Biwa Resort, Otsu, Japan, October 14-19, 2007. pp.481-484, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	600-603

Conference Proceedings

8. Graphene Formation on SiC Substrates

B.L. VanMil ; R.L. Myers-Ward ; J.L. Tedesco ; C.R. Eddy Jr. ; G.G. Jernigan

Pub. info.:	Silicon carbide and related materials 2008 : selected peer reviewed papers from the 7th European Conference on Silicon Carbide and Related Materials, September 7-11 Barcelona, Spain. pp.211-214, 2009. Aedermannsdorf, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	615-617

Conference Proceedings

9. Etching of 4° and 8° 4H-SiC Using Various Hydrogen-Propane Mixtures in a Commercial Hot-Wall CVD Reactor

K.K. Lew ; B.L. Van Mil ; R.L. Myers-Ward ; R.T. Holm ; C.R. Eddy Jr. ; D.K. Gaskill

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.513-516, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

10.

Conference Proceedings

10. Comparative Investigation between X-Ray Diffraction and Cross Polarization Mapping of 4H-SiC Wafers Off-Cut 4° Towards (11-20)

D.K. Gaskill ; M.A. Mastro ; K.K. Lew ; B.L. Van Mil ; R.L. Myers-Ward ; R.T. Holm ; C.R. Eddy Jr

Pub. info.:	Silicon carbide and related materials 2006 : ECSCRM 2006, Proceedings of the 6th European Conference on Silicon Carbide and Related Materials, Newcastle upon Tyne, UK, September 2006. pp.235-238, 2007. Stafa-Zuerich. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	556-557

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