Physical and numerical simulation of materials processing : selected peer reviewed papers from the 5th International Conference on Physical and Numerical Simulation of Materials Processing, October 23-27, 2007, held in Zhengzhou, China. pp.432-437, 2008. Aedermannsdorf, Switzerland. Trans Tech Publications
L. Zavyalova ; H. Song ; K. Lucas ; Q. Zhang ; J. Shiely
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Photomask and next-generation lithography mask technology XV. 2 pp.70283B-1-70283B-12, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
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Proceedings of SPIE - the International Society for Optical Engineering
Photomask and next-generation lithography mask technology XV. 1 pp.70280L-1-70280L-10, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Q. Zhang ; H. Song ; K. Lucas ; B. Ward ; J. Shiely
Pub. info.:
Photomask and next-generation lithography mask technology XV. 1 pp.702813-1-702813-11, 2008. Bellingham, Wash.. Society of Photo-optical Instrumentation Engineers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering