Design, test, integration, and packaging of MEMS/MOEMS 2001 : 25-27 April 2001, Cannes, France. pp.381-390, 2001. Bellingham, Washington. SPIE-The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
Materials and Device Characterization in Micromachining III. pp.149-157, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering