1.
|
Conference Proceedings
|
Hector, S.D. ; Postnikov, S.V. ; Cobb, J.
Pub. info.: |
Optical Microlithography XVII. pp.555-570, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|
2.
|
Conference Proceedings
|
Trouiller, Y. ; Postnikov, S.V. ; Lucas, K.D. ; Sundermann, F. ; Patterson, K. ; Belledent, J. ; Couderc, C. ; Rody, Y.F.
Pub. info.: |
Optical Microlithography XVII. pp.1081-1092, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5377 |
|