Popov, V.P. ; Tyschenko, I.E. ; Kachurin, G.A. ; Janovskaja, S.G. ; Obodnikov, V.I.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.309-317, 1997. Pennington, NJ. Electrochemical Society
Antonova, I.V. ; Misiuk, A. ; Popov, V.P. ; Plotnikov, A.E. ; Surma, B.
Pub. info.:
Proceedings of the Symposium on Crystalline Defects and Contamination, their Impact and Control in Device Manufacturing II. pp.98-106, 1997. Pennington, NJ. Electrochemical Society