Search records | 東京工業大学附属図書館文献データベース

Sort order

2 results

Conference Proceedings

1. The Influence of Amorphizing Implants on Boron Diffusion in Silicon

Chao, H. S. ; Griffin, P. B. ; Plummer, J. D.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.347-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

Conference Proceedings

2. Defects and Diffusion Issues for the Manufacturing of Semiconductors in the 21st Century

Plummer, J. D.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.3-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469