1.
Conference Proceedings
Wong, A.K. ; Pierrat, C.
Pub. info.:
Wave-optical wywtems engineering II : 3-4 August 2003, San Diego, California, USA . pp.63-72, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5182
2.
Conference Proceedings
Driessen, F.A. ; Pierrat, C. ; Vandenberghe, G. ; Ronse, K.G. ; Adrichem, P. ; Liu, H.-Y.
Pub. info.:
Optical Microlithography XVI . Part Two pp.1091-1102, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
3.
Conference Proceedings
Pierrat, C. ; Driessen, F.A.J.M. ; Vandenberghe, G.
Pub. info.:
Optical Microlithography XVI . Part One pp.282-293, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040
4.
Conference Proceedings
Pierrat, C. ; Wong, A.K.K.
Pub. info.:
Optical Microlithography XVI . Part One pp.193-202, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5040