Ayres, J. ; Walker, B. ; Chandra, L.. K.. ; Stefanescu, D. ; Chu, C. ; Parsons, G. ; Gorman, C.
Pub. info.:
Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems. pp.60030J-, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering