1.

Conference Proceedings
Conference Proceedings
1. Effect of Al, Ta, and O Precursors on Growth and Properties of Al2O3 and Ta2O5 Thin Films Deposited by Triode PECVD
Klein, T. ; Niu, D. ; Parsons, G.
Pub. info.: Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A..  pp.445-,  1999.  Warrendale, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 567
2.

Conference Proceedings
Conference Proceedings
2. Wavelet Analysis of Mass Spectrometry Signals for Transient Event Detection and Run-to-Run Process Control
Rying, E.A. ; Gyurcsik, R.S. ; Lu, J.C. ; Bilbro, G. ; Parsons, G. ; Sorrell, F.Y.
Pub. info.: Proceedings of the Second International Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing.  pp.37-44,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-9