Third International conference on virtual reality and its application in industry : 9-12 April 2002, Hangzhou, China. pp.178-184, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Park, C. ; Dutta, I. ; Peterson, K. A. ; Vella, J.
Pub. info.:
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A.. pp.385-390, 2003. Warrendale, Pa.. Materials Research Society
Park, C. ; Kim, I.-J. ; Ahn, S. C. ; Ko, H. ; Kwon, Y.-M. ; Kim, H.-G.
Pub. info.:
Third International conference on virtual reality and its application in industry : 9-12 April 2002, Hangzhou, China. pp.286-293, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.406-414, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering