Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices. pp.69-74, 1997. Pennington, NJ. Electrochemical Society
Tamura, S. ; Mori, K. ; Maruhashi, T. ; Yoshida, K. ; Ohtani, K. ; Kamijyo, N. ; Suzuki, Y. ; Kihara, H.
Pub. info.:
Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.. pp.779-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society