1.

Conference Proceedings
Conference Proceedings
1. High Integrity Direct Oxidation/Nitridation at Low Temperatures Using Radicals
Ohmi, T. ; Sugawa, S. ; Hirayama, M.
Pub. info.: Silicon Nitride and Silicon Dioxide Thin Insulating Films : proceedings of the sixth International Symposium.  pp.241-252,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-7
2.

Conference Proceedings
Conference Proceedings
2. Improvement of Gate Oxide Integrity by Preparing Atomic Order Flattened Si (100) Surface
Nakamura, O. ; Ohkawa, T. ; Ohmi, T.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.101-112,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
3.

Conference Proceedings
Conference Proceedings
3. Low-Temperature Formation of Gate-Grade Silicon Oxide Films Using High-Density Krypton Plasma
Saito, Y. ; Sekine, K. ; Hirayama, M. ; Ohmi, T.
Pub. info.: The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000.  pp.113-124,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-2
4.

Conference Proceedings
Conference Proceedings
4. Micro-Arc Nitriding of Titanium Surface
Matsuura, K. ; Arita, H. ; Ohmi, T. ; Kudoh, M. ; Miyamoto, Y.
Pub. info.: Functionally graded materials VIII : proceedings of the 8th International Symposium on Multifunctional and Functionally Graded Materials (FGM2004) : held in Leuven, Belgium, 11-14 July 2004.  pp.225-228,  2005.  Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 492-493
5.

Conference Proceedings
Conference Proceedings
5. Solar Wind Imaging Facility (SWIFT) for space weather research
Kojima, M. ; Tokumaru, M. ; Fujiki, K. ; Ishida, Y. ; Ohmi, T. ; Hayashi, K. ; Yamashita, M.
Pub. info.: Innovative telescopes and instrumentation for solar astrophysics : 24-28 August 2002, Waikoloa, Hawaii, USA.  pp.121-128,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4853
6.

Conference Proceedings
Conference Proceedings
6. Suppression of Surface Micro-Roughness on Si(110)
Nii, K. ; Akahori, H. ; Yamamoto, M. ; Teramoto, A. ; Ohmi, T.
Pub. info.: Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium.  pp.392-403,  2004.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-04
7.

Conference Proceedings
Conference Proceedings
7. INFLUENCE OF MOLECULAR WEIGHT OF ORGANIC CONTAMINANTS UPON ADSORPTION BEHAVIORS ONTO SILICON SURFACES
Nagase, M. ; Kitano, M. ; Wakayama, Y. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.47-53,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
8.

Conference Proceedings
Conference Proceedings
8. EFFECT OF pH VALUES IN OZONIZED ULTRAPURE WATER ON CLEANING EFFICIENCY
Yokoi, I. ; Choi, G.-M. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.69-76,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
9.

Conference Proceedings
Conference Proceedings
9. DIFFERENT ADSORPTION BEHVIORS OF PLATINUM GROUP METALS ONSILICON SURFACES
Yokoi, I. ; Kitami, K. ; Choi, G.-M. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.102-109,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
10.

Conference Proceedings
Conference Proceedings
10. Analysis of Negative Pressure in Solidifying Al-Si Alloy with Effect of Fluid Flow and Solid Deformation
Ohsasa, K. ; Ohmi, T.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2691-2694,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(4)
11.

Conference Proceedings
Conference Proceedings
11. Al2O3 Passivation Film on Austenitic Stainless Steel Free from Plasma Damage
Kitano, M. ; Nagase, M. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Corrosion and corrosion protection : proceedings of the international symposium.  pp.115-121,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-22
12.

Conference Proceedings
Conference Proceedings
12. Model of coating and drying process for flat polymer film fabrication
Kagami, H. ; Miyagawa, R. ; Kawata, A. ; Nakashima, D ; Kobayashi, S. ; Kitano, T. ; Takeshita, K. ; Kubota, H. ; Ohmi, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.252-259,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754