1.

Conference Proceedings
Conference Proceedings
1. INFLUENCE OF MOLECULAR WEIGHT OF ORGANIC CONTAMINANTS UPON ADSORPTION BEHAVIORS ONTO SILICON SURFACES
Nagase, M. ; Kitano, M. ; Wakayama, Y. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Cleaning technology semiconductor device manufacturing : proceedings of the seventh international symposium.  pp.47-53,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-26
2.

Conference Proceedings
Conference Proceedings
2. Al2O3 Passivation Film on Austenitic Stainless Steel Free from Plasma Damage
Kitano, M. ; Nagase, M. ; Shirai, Y. ; Ohmi, T.
Pub. info.: Corrosion and corrosion protection : proceedings of the international symposium.  pp.115-121,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-22