1.

Conference Proceedings
Conference Proceedings
1. PE-CVD of F-Doped SiO2 Thin Films Using Tetraisocyanatesilane and Tetrafluorosilane
Shirafuji, T. ; Sawada, M. ; Nakagami, Y. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Low-dielectric constant materials II : symposium held December 2-3, 1996, Boston, Massachusetts, U.S.A..  pp.137-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 443
2.

Conference Proceedings
Conference Proceedings
2. Epitaxial Growth of High-Quality SiC by Sublimation Close-Space Technique
Nishino, S. ; Yoshida, T. ; Nishio, Y.
Pub. info.: Power semiconductor materials and devices : symposium held December 1-4, 1997, Boston, Massachusetts, U.S.A..  pp.307-,  1998.  Warrendale, Penn..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 483
3.

Conference Proceedings
Conference Proceedings
3. PECVD of Fluorocarbon/Silicon Oxide Composite Thin Films From TFE and HMDSO
Shirafuji, T. ; Hayashi, Y. ; Nishino, S.
Pub. info.: Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A..  pp.173-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 544
4.

Conference Proceedings
Conference Proceedings
4. Properties of 4H-SiC by sublimation close space technique
Nishino, S. ; Matsumoto, K. ; Chen, Y. ; Nishio, Y.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.179-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572
5.

Conference Proceedings
Conference Proceedings
5. Properties of heteroepitaxial 3C-SiC layer on Si using Si2(CH3)6 by CVD
Chen, Y. ; Masuda, Y. ; Nishio, Y. ; Matsumoto, K. ; Nishino, S.
Pub. info.: Wide-bandgap semiconductors for high-power, high-frequency, and high temperature applications--1999 : symposium held April 5-8, 1999, San Francisco, California, U.S.A..  pp.191-,  1999.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 572