1.

Conference Proceedings
Conference Proceedings
1. A Forming Gas Based Photoresist Removal Process to Eliminate Oxidation of Siloxane Spin-on Glass
Cheng, C.C. ; Burke, R ; Kennedy, J. ; Nguyen, D. ; Wall, R. ; Lowe, B.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.564-575,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. The Effect of Steam and Gamma Sterilization on the Thermal and Mechanical Properties of Polyester Film
Hu, C. B. ; Ma, M. T. ; McIntyre, J. ; Nguyen, D. ; Myers, K. E.
Pub. info.: ANTEC 94 : plastics : gateway to the future : conference proceedings, San Francisco May 1-5 1994 : Volume III. Special areas.  3  pp.2625-2629,  1994.  Brookfield, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 40(3)
3.

Conference Proceedings
Conference Proceedings
3. Low-k SOG Etchback and TEOS Oxide Capping
Huang, K. G. ; Cheung, D. ; Nguyen, D. ; Forester, L.
Pub. info.: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.45-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 476