1.

Conference Proceedings
Conference Proceedings
1. SILICIDE FORMATION BY HIGH DOSE TRANSITION METAL IMPLANTS INTO Si
Sanchez, F.H. ; Namavar, F. ; Budnick, J.I. ; Fasihudin, A. ; Hayden, H.C.
Pub. info.: Beam-solid interactions and phase transformations : symposium held December 2-4, 1985, Boston, Massachusetts, USA.  pp.439-444,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 51
2.

Conference Proceedings
Conference Proceedings
2. ON THE FORMATIUON OF Si OXIDE BY ION IMPLANTATION
Namavar, F. ; Budnick, J. I. ; Sanchez, F. H. ; Hayden, H. C.
Pub. info.: Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A..  pp.317-322,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 45
3.

Conference Proceedings
Conference Proceedings
3. FORMATION OP BURIED Si02 BY HIGH DOSE IMPLANTATION OF OXYGEN AT RODM AND LIQUID NITROGEN TEMPERATURES
Namavar, F. ; Budnick, J.I. ; Sanchez, F.H. ; Hayden, H.C.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.233-238,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53
4.

Conference Proceedings
Conference Proceedings
4. STUDY OF DOSE AND DOSE RATE IN THE IMPLANTATION OF NITROGEN ISOTOPES INTO Si(100)
Namavar, F. ; Budnick, J.I. ; Fasihuddin, A. ; Sanchez, F.H. ; Hayden, H.C.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.281-288,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53